| 2021 | Csernyus, Bence and Szabó, Ágnes and Fiáth, Richárd and Zátonyi, Anita and Lázár, Csaba and Pongrácz, Anita and Fekete, Zoltán: A multimodal, implantable sensor array and measurement system to investigate the suppression of focal epileptic seizure using hypothermia. In: JOURNAL OF NEURAL ENGINEERING, 18, 2021, |
|---|
| 2021 | Ebrahimi, Nafiseh and Bi, Chenghao and Cappelleri, David J. and Ciuti, Gastone and Conn, Andrew T. and Faivre, Damien and Habibi, Neda and Hošovský, Alexander and Iacovacci, Veronica and Khalil, Islam S. M. and Magdanz, Veronika and Misra, Sarthak and Pawashe, Chytra and Rashidifar, Rasoul and Soto‐Rodriguez, Paul Eduardo David and Fekete, Zoltán and Jafari, Amir: Magnetic Actuation Methods in Bio/Soft Robotics. In: ADVANCED FUNCTIONAL MATERIALS, 31, 2021, |
|---|
| 2021 | Szabó, Ágnes and Liliom, Hanna Laura and Fekete, Zoltán and Schlett, Katalin and Pongrácz, Anita: SU-8 microstructures alter the attachment and growth of glial cells in vitro. In: MATERIALS TODAY COMMUNICATIONS, 27, 2021, |
|---|
| 2021 | Fedor, Flóra Zsófia and Madarász, Miklós and Zátonyi, Anita and Szabó, Ágnes and Lőrincz, Tibor and Danda, Vindhya and Spurgin, Lisa and Manz, Connie and Rózsa J., Balázs and Fekete, Zoltán: Soft, Thiol‐ene/Acrylate‐Based Electrode Array for Long‐Term Recording of Intracranial EEG Signals with Improved Biocompatibility in Mice. In: ADVANCED MATERIALS TECHNOLOGIES, In press, 2021, |
|---|
| 2020 | Fedor, Flóra Zsófia and Zátonyi, Anita and Cserpán, Dorottya and Somogyvári, Zoltán and Borhegyi, Zsolt and Juhász, G. and Fekete, Zoltán: Application of a flexible polymer microECoG array to map functional coherence in schizophrenia model. In: METHODSX, 7, 2020, |
|---|
| 2020 | Fedor, Flóra Zsófia and Szekeres-Paraczky, Cecília and Ravasz, L. and Tóth, K. and Borhegyi, Zsolt and Somogyvári, Zoltán and Juhász, G. and Fekete, Zoltán: Electrophysiological and behavioral properties of 4-aminopyridine-induced epileptic activity in mice. In: BIOLOGIA FUTURA, 71, 2020, 427-434 |
|---|
| 2020 | Horváth, Ágoston Csaba and Borbély, Sándor and Boros, Csanád Örs and L., Komáromi and Koppa, Pál and Barthó, Péter and Fekete, Zoltán: Infrared neural stimulation and inhibition using an implantable silicon photonic microdevice. In: MICROSYSTEMS & NANOENGINEERING, 6, 2020, |
|---|
| 2020 | Fekete, Zoltán and Horváth, Ágoston Csaba and Zátonyi, Anita: Infrared neuromodulation: a neuroengineering perspective. In: JOURNAL OF NEURAL ENGINEERING, 17, 2020, |
|---|
| 2020 | Csernyus, Bence and Szabó, Ágnes and Zátonyi, Anita and Hodován, Róbert and Lázár, Csaba and Fekete, Zoltán and Erőss, Loránd and Pongrácz, Anita: Recent antiepileptic and neuroprotective applications of brain cooling. In: SEIZURE-EUROPEAN JOURNAL OF EPILEPSY, 82, 2020, 80-90 |
|---|
| 2020 | Zátonyi, Anita and Madarász, Miklós and Szabó, Ágnes and Lőrincz, T and Hodován, R and Rózsa J., Balázs and Fekete, Zoltán: Transparent, low-autofluorescence microECoG device for simultaneous Ca 2+ imaging and cortical electrophysiology in vivo. In: JOURNAL OF NEURAL ENGINEERING, 17, 2020, |
|---|
| 2019 | Larramendy, Florian and Yoshida, Shotaro and Maier, Daniela and Fekete, Zoltán and Takeuchi, Shoji and Paul, Oliver: 3D arrays of microcages by two-photon lithography for spatial organization of living cells. In: LAB ON A CHIP, 19, 2019, 875-884 |
|---|
| 2019 | Zátonyi, Anita and Orbán, Gábor and Modi, R. and Márton, Gergely and Meszéna, Domokos and Ulbert, István and Pongrácz, Anita and Ecker, M. and Voit, W. E. and Joshi-Imre, A. and Fekete, Zoltán: A softening laminar electrode for recording single unit activity from the rat hippocampus. In: SCIENTIFIC REPORTS, 9, 2019, |
|---|
| 2019 | Liliom, Hanna Laura and Lajer, Panna and Bérces, Zsófia and Csernyus, Bence and Szabó, Ágnes and Pinke, Domonkos Péter and Lőw, Péter and Fekete, Zoltán and Pongrácz, Anita and Schlett, Katalin: Comparing the effects of uncoated nanostructured surfaces on primary neurons and astrocytes. In: JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A, 107, 2019, 2350-2359 |
|---|
| 2019 | Csernai, Márton László and Borbély, Sándor and Kocsis, Kinga and Burka, Dávid and Fekete, Zoltán and Balogh, Veronika and Káli, Szabolcs and Emri, Zsuzsa and Barthó, Péter: Dynamics of sleep oscillations is coupled to brain temperature on multiple scales.. In: JOURNAL OF PHYSIOLOGY-LONDON, 597, 2019, 4069-4086 |
|---|
| 2019 | Boros, Csanád Örs and Horváth, Ágoston Csaba and Beleznai, Szabolcs and Sepsi, Örs and Csősz, D. and Fekete, Zoltán and Koppa, Pál: Optimization of an optrode microdevice for infrared neural stimulation. In: APPLIED OPTICS, 58, 2019, 3870-3876 |
|---|
| 2018 | Horváth, Ágoston Csaba and Boros, Csanád Örs and Beleznai, Szabolcs and Sepsi, Örs and Koppa, Pál and Fekete, Zoltán: A multimodal microtool for spatially controlled infrared neural stimulation in the deep brain tissue. In: SENSORS AND ACTUATORS B-CHEMICAL, 263, 2018, 77-86 |
|---|
| 2018 | Bérces, Zsófia and Pomothy, Judit and Horváth, Ágoston Csaba and Kőhidi, Tímea and É, Benyei and Fekete, Zoltán and Madarász, Emilia and Pongrácz, Anita: Effect of nanostructures on anchoring stem cell-derived neural tissue to artificial surfaces. In: JOURNAL OF NEURAL ENGINEERING, 15, 2018, |
|---|
| 2018 | Zátonyi, Anita and Borhegyi, Zsolt and Srivastava, M and Cserpán, Dorottya and Somogyvári, Zoltán and Kisvárday, Zoltán and Fekete, Zoltán: Functional brain mapping using optical imaging of intrinsic signals and simultaneous high-resolution cortical electrophysiology with a flexible, transparent microelectrode array. In: SENSORS AND ACTUATORS B-CHEMICAL, 273, 2018, 519-526 |
|---|
| 2018 | Zátonyi, Anita and Fedor, Flóra Zsófia and Borhegyi, Zsolt and Fekete, Zoltán: In vitro and in vivo stability of black-platinum coatings on flexible, polymer microECoG arrays. In: JOURNAL OF NEURAL ENGINEERING, 15, 2018, |
|---|
| 2018 | Pongrácz, Anita and Barna, Szabolcs and Lukács, István Endre and Illés, Levente and Liliom, Hanna Laura and Lajer, Panna and Csernyus, Bence and Szabó, Ágnes and Bérces, Zsófia and Fekete, Zoltán and Lőw, Péter and Schlett, Katalin: Modification of Glial Attachment by Surface Nanostructuring of SU-8 Thin Films. In: PROCEEDINGS, 2, 2018, |
|---|
| 2018 | Boros, Csanád Örs and Horváth, Ágoston Csaba and Beleznai, Szabolcs and Sepsi, Örs and Lenk, Sándor and Fekete, Zoltán and Koppa, Pál: Optical and thermal modeling of an optrode microdevice for infrared neural stimulation. In: APPLIED OPTICS, 57, 2018, 6952-6957 |
|---|
| 2018 | Zátonyi, Anita and Szabó, Ágnes and Fedor, Flóra Zsófia and Horváth, Ágoston Csaba and Pongrácz, Anita and Fekete, Zoltán: Trendek a polimer alapú mikroimplantátumok fejlesztésében. In: ANYAGOK VILÁGA, 15, 2018, 17-33 |
|---|
| 2017 | Zoltan Fekete, Marton Csernai, Kinga Kocsis, Ágoston Csaba Horváth, Anita Pongrácz, Peter Barthó: Simultaneous in vivo recording of local brain temperature and electrophysiological signals with a novel neural probe. In: Journal of Neural Engineering, 2017, 034001 |
|---|
| 2017 | Fekete, Zoltán and Pongrácz, Anita: Multifunctional soft implants to monitor and control neural activity in the central and peripheral nervous system: a review. In: SENSORS AND ACTUATORS B-CHEMICAL, 243, 2017, 1214-1223 |
|---|
| 2017 | Horváth, Ágoston Csaba and Sepsi, Örs and Boros, Csanád Örs and Beleznai, Szabolcs and Koppa, Pál and Fekete, Zoltán: Multimodal Neuroimaging Microtool for Infrared Optical Stimulation, Thermal Measurements and Recording of Neuronal Activity in the Deep Tissue. In: PROCEEDINGS, 1, 2017, |
|---|
| 2017 | Zátonyi, Anita and Borhegyi, Zsolt and Cserpán, Dorottya and Somogyvári, Zoltán and Srivastava, M and Kisvárday, Zoltán and Fekete, Zoltán: Optical Imaging of Intrinsic Neural Signals and Simultaneous MicroECoG Recording Using Polyimide Implants.. In: PROCEEDINGS, 1, 2017, |
|---|
| 2017 | Fekete, Zoltán and Csernai, Márton László and Kocsis, Kinga and Horváth, Ágoston Csaba and Pongrácz, Anita and Barthó, Péter: Simultaneous in vivo recording of local brain temperature and electrophysiological signals with a novel neural probe. In: JOURNAL OF NEURAL ENGINEERING, 14, 2017, |
|---|
| 2016 | Horváth, Ágoston Csaba and Kocsis, Kinga and M, Csernai and Barthó, Péter and Fekete, Zoltán: A Novel Neural Probe for Simultaneous Electrical Recording and Local Thermal Control in Sleep Spindle Oscillation Studies. In: PROCEDIA ENGINEERING, 168, 2016, 109-112 |
|---|
| 2016 | Márton, Gergely and P, Baracskay and Cseri, Barbara and B, Plósz and Juhász, Gábor Dénes and Fekete, Zoltán and Pongrácz, Anita: A silicon-based microelectrode array with a microdrive for monitoring brainstem regions of freely moving rats. In: JOURNAL OF NEURAL ENGINEERING, 13, 2016, |
|---|
| 2016 | Bérces, Zsófia and Csernyus, B and Liliom, Hanna Laura and Schlett, Katalin and Pinke, D and Lőw, Péter and Horváth, Ágoston Csaba and Fekete, Zoltán and Pongrácz, Anita: Attachment of Primary Mouse Astroglial Cells on Neural Implant Surfaces. In: PROCEDIA ENGINEERING, 168, 2016, 172-175 |
|---|
| 2016 | Fekete, Zoltán and Pálfi, Emese and Márton, Gergely and Handbauer, Máté and Bérces, Zsófia and Ulbert, István and Pongrácz, Anita and Négyessy, László: Combined in vivo recording of neural signals and iontophoretic injection of pathway tracers using a hollow silicon microelectrode. In: SENSORS AND ACTUATORS B-CHEMICAL, 236, 2016, 815-824 |
|---|
| 2016 | Bérces, Zsófia and Tóth, Kinga and Márton, Gergely and Pál, Ildikó and B, Kováts-Megyesi and Fekete, Zoltán and Ulbert, István and Pongrácz, Anita: Neurobiochemical changes in the vicinity of a nanostructured neural implant. In: SCIENTIFIC REPORTS, 6, 2016, |
|---|
| 2016 | Kiss, M and Földesy, Péter and Fekete, Zoltán: Optimization of a Michigan-type silicon microprobe for infrared neural stimulation. In: SENSORS AND ACTUATORS B-CHEMICAL, 224, 2016, 676-682 |
|---|
| 2016 | Rajta, István and Huszánk, Róbert and Szabó, ATT and Nagy, Gyula and Szilasi, Szabolcs Zoltán and Fürjes, Péter and Holczer, Eszter Gabriella and Fekete, Zoltán and Járvás, Gábor and Szigeti, Márton and Hajba, László and Bodnár, Judit and Guttman, András: Tilted pillar array fabrication by the combination of proton beam writing and soft lithography for microfluidic cell capture: Part 1 Design and feasibility. In: ELECTROPHORESIS, 37, 2016, 498-503 |
|---|
| 2015 | Fekete, Zoltán and A, Németh and Márton, Gergely and Ulbert, István and Pongrácz, Anita: Experimental study on the mechanical interaction between silicon neural microprobes and rat dura mater during insertion. In: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 26, 2015, |
|---|
| 2015 | Fekete, Zoltán and Pálfi, Emese and Márton, G and Handbauer, Máté and Bérces, Zsófia and Ulbert, István and Pongrácz, Anita and Négyessy, László: In Vivo Iontophoretic BDA Injection through a Buried Microfluidic Channel of a Neural Multielectrode. In: PROCEDIA ENGINEERING, 120, 2015, 464-467 |
|---|
| 2015 | Fürjes, Péter and Holczer, Eszter Gabriella and Leelőssyné Tóth, Eszter and Iván, Kristóf and Fekete, Zoltán and Bernier, D and Dortu, F and Giannone, D: PDMS microfluidics developed for polymer based photonic biosensors. In: MICROSYSTEM TECHNOLOGIES, 21, 2015, 581-590 |
|---|
| 2015 | Fekete, Zoltán: Recent advances in silicon-based neural microelectrodes and microsystems: a review. In: SENSORS AND ACTUATORS B-CHEMICAL, 215, 2015, 300-315 |
|---|
| 2015 | F, Larramendy and S, Yoshida and Fekete, Zoltán and D, Serien and S, Takeuchi and O, Paul: Stackable octahedron-based photoresist scaffold by direct laser writing for controlled three-dimensional cell networks. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. 2015. 642-645 |
|---|
| 2015 | Fekete, Zoltán: Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding. In: MICROSYSTEM TECHNOLOGIES, 21, 2015, 341-344 |
|---|
| 2014 | Fekete, Zoltán and Horváth, Ágoston Csaba and Bérces, Zsófia and Pongrácz, Anita: Black poly-silicon: a nanostructured seed layer for sensor applications. In: SENSORS AND ACTUATORS A-PHYSICAL, 216, 2014, 277-286 |
|---|
| 2014 | Fekete, Zoltán: Development of silicon microfluidic systems for life sciences. Scholar's Press, 2014 |
|---|
| 2014 | Márton, Gergely and Bakos, István and Fekete, Zoltán and Ulbert, István and Pongrácz, Anita: Durability of high surface area platinum deposits on microelectrode arrays for acute neural recordings. In: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 25, 2014, 931-940 |
|---|
| 2014 | Bérces, Zsófia and Horváth, Ágoston Csaba and Jády, Attila and Pongrácz, Anita and E, Madarász and Fekete, Zoltán: Neural Cell Response to Nanostructured Biosensor Surfaces. In: PROCEDIA ENGINEERING, 87, 2014, 971-974 |
|---|
| 2014 | M, Kiss and Földesy, Péter and Fekete, Zoltán: Optrode for Multimodal Deep-brain Infrared Stimulation. In: PROCEDIA ENGINEERING, 87, 2014, 1537-1540 |
|---|
| 2013 | Fürjes, Péter and Fekete, Zoltán and Holczer, Eszter Gabriella and Leelőssyné Tóth, Eszter and Iván, Kristóf and Bársony, István: Chaotic mixing of particles in microfluidic systems. Proceedings of the Microfluidics 2012 Conference. 2013. |
|---|
| 2013 | Pongrácz, Anita and Fekete, Zoltán and Márton, Gergely and Bérces, Zsófia and Ulbert, István and Fürjes, Péter: Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery. In: SENSORS AND ACTUATORS B-CHEMICAL, 189, 2013, 97-105 |
|---|
| 2013 | Leelőssyné Tóth, Eszter and Iván, Kristóf and Fürjes, Péter and Fekete, Zoltán and Holczer, Eszter Gabriella: Design, realisation and validation of microfluidic stochastic mixers integrable in bioanalytical systems using CFD modeling. 2013 IEEE Biomedical Circuits and Systems Conference, BioCAS 2013. 2013. 266-269 |
|---|
| 2013 | Fekete, Zoltán and Hajnal, Zoltán and Márton, Gergely and Fürjes, Péter and Pongrácz, Anita: Fracture analysis of silicon microprobes designed for deep-brain stimulation.. In: MICROELECTRONIC ENGINEERING, 103, 2013, 160-166 |
|---|
| 2013 | Márton, Gergely and Fekete, Zoltán and Fiáth, Richárd and Baracskay, Péter and Ulbert, István and Juhász, Gábor Dénes and Battistig, Gábor and Pongrácz, Anita: In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths. In: IEEE SENSORS JOURNAL, 13, 2013, 3263-3269 |
|---|
| 2013 | Fekete, Zoltán and A, Németh and Márton, Gergely and Vázsonyi, Éva and Ulbert, István and Fürjes, Péter and Pongrácz, Anita: Mechanical interaction between silicon microprobes and rat brain tissue. Proceedings of 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2013. 1185-1187 |
|---|
| 2013 | Fekete, Zoltán and Pongrácz, Anita and Márton, Gergely and Fürjes, Péter: On the fabrication parameters of buried microchannels integrated in in-plane silicon microprobes.. In: MATERIALS SCIENCE FORUM, 729, 2013, 210-215 |
|---|
| 2013 | Holczer, Eszter Gabriella and Fekete, Zoltán and Fürjes, Péter: Surface modification of PDMS based microfluidic systems by tensides. In: MATERIALS SCIENCE FORUM, 729, 2013, 361-366 |
|---|
| 2012 | Pongrácz, Anita and Fekete, Zoltán and Márton, Gergely and Fiáth, Richárd and Fürjes, Péter and Ulbert, István and Battistig, Gábor: Deep-brain silicon multielectrodes for simultaneous neural recording and drug delivery.. In: PROCEDIA ENGINEERING, 47, 2012, 281-284 |
|---|
| 2012 | Márton, Gergely and Fekete, Zoltán and Bakos, István and Battistig, Gábor and Pongrácz, Anita and Baracskay, Péter and Juhász, Gábor Dénes and Bársony, István: Deep-brain silicon multielectrodes with surface-modified Pt recording sites. In: IEEE SENSORS PROCEEDINGS, 2012, 2012, 1156-1159 |
|---|
| 2012 | Fürjes, Péter and Holczer, Eszter Gabriella and Fekete, Zoltán and Leelőssyné Tóth, Eszter and F, Dortu and D, Giannone: Development of a polimer based microfluidics for polimer based photonic biosensors. Proceedings of the Microfluidics 2012 Conference. 2012. |
|---|
| 2012 | Fürjes, Péter and Fekete, Zoltán and Illés, Levente and Tóth, Attila Lajos and Battistig, Gábor and Gyurcsányi, Ervin Róbert: Effects of the Focused Ion Beam parameters on nanopore milling in solid state membranes. In: PROCEDIA ENGINEERING, 47, 2012, 684-687 |
|---|
| 2012 | Fekete, Zoltán and Pongrácz, Anita and Fürjes, Péter and Battistig, Gábor: Improved process flow for buried channel fabrication in silicon. In: MICROSYSTEM TECHNOLOGIES, 18, 2012, 353-358 |
|---|
| 2012 | Fekete, Zoltán and Huszka, G and Pongrácz, Anita and Jágerszki, Gyula and Gyurcsányi, Ervin Róbert and Vrouwe, E and Fürjes, Péter: Integrated microfluidic environment for solid-state nanopore sensors. In: PROCEDIA ENGINEERING, 47, 2012, 13-16 |
|---|
| 2012 | Fürjes, Péter and Fekete, Zoltán and Holczer, Eszter Gabriella and Leelőssyné Tóth, Eszter and Iván, Kristóf and Bársony, István: Particle Mixing by Chaotic Advection in Polymer Based Microfluidic Systems. In: PROCEDIA ENGINEERING, 47, 2012, 454-457 |
|---|
| 2012 | Fekete, Zoltán and Péter, Nagy and Gergely, Huszka and Ferenc, Tolner and Pongrácz, Anita and Fürjes, Péter: Performance characterization of micromachined particle separation system based on Zweifach–Fung effect. In: SENSORS AND ACTUATORS B-CHEMICAL, 162, 2012, 89-94 |
|---|
| 2012 | Földesy, Péter and Fekete, Zoltán and Pardy, Tamás and Gergelyi, Domonkos: Terahertz Spatial Light Modulator with Digital Microfluidic Array. In: PROCEDIA ENGINEERING, 47, 2012, 965-968 |
|---|
| 2011 | Fekete, Zoltán and Pongrácz, Anita and Szendrey, Á and Fürjes, Péter: Buried microchannels in silicon with planar surface. MME2011. 2011. 38-41 |
|---|
| 2011 | Gyurcsányi, Ervin Róbert and Makra, István and Jágerszki, Gyula and Bakk, DT and Fekete, Zoltán and Battistig, Gábor and Bársony, István and Fürjes, Péter: Characterisation of solid-state gold nanopores applicable for biochemical sensing. In: PROCEDIA ENGINEERING, 25, 2011, 904-907 |
|---|
| 2011 | Dortu, F and Egger, H and Kolari, K and Haatainen, T and Fürjes, Péter and Fekete, Zoltán and Bernier, D and Sharp, G and Lahiri, B and Kurunczi, Sándor and Sanchez, JC and Turck, N and Petrik, Péter and Patkó, Dániel and Horváth, Róbert and Eiden, S and Aalto, T and Watts, S and Johnson, NP and De La Rue, RM and Giannone, D: Design and process development of a photonic crystal polymer biosensor for point of care diagnostics. In: PROGRESS IN BIOMEDICAL OPTICS AND IMAGING (PROCEEDINGS OF SPIE), 8087, 2011, |
|---|
| 2011 | Fekete, Zoltán and Holczer, Eszter Gabriella and Leelőssyné Tóth, Eszter and Iván, Kristóf and Fürjes, Péter: Design and realisation microfluidic stochastic mixers integrable in bioanalytical systems. MME2011. 2011. 295-297 |
|---|
| 2011 | Fekete, Zoltán and Nagy, P and Pongrácz, Anita and Bársony, István and Fürjes, Péter: Efficiency test on the experimental design of micromachined blood separation system based on Zweifach-Fung effect. In: PROCEDIA ENGINEERING, 25, 2011, 1241-1244 |
|---|
| 2011 | Fekete, Zoltán and Pongrácz, Anita and Márton, Gergely and Fürjes, Péter: Mechanical characterization of hollow silicon microprobes fabricated by Deep Reactive Ion Etching. In: EUROPEAN BIOPHYSICS JOURNAL, 40, 2011, 226-226 |
|---|
| 2011 | Márton, Gergely and Pongrácz, Anita and Grand, László and Vazsonyi, E and Ulbert, István and Karmos, György and Fekete, Zoltán and Battistig, Gábor: Neural signal recording with a novel multisite silicon probe. In: EUROPEAN BIOPHYSICS JOURNAL, 40, 2011, 229-229 |
|---|
| 2011 | Fekete, Zoltán and Holczer, Eszter Gabriella and Leelőssyné Tóth, Eszter and Iván, Kristóf and Fürjes, Péter: Stochastic mixing in microfluidics integrable in bioanalytical systems. In: PROCEDIA ENGINEERING, 25, 2011, 1229-1232 |
|---|
| 2010 | Fekete, Zoltán and Sinkovics, Bálint and Rajta, István and Gál, Gabriella and Fürjes, Péter: Characterization of the end-of-range geometric effects in complex 3D silicon micro-components formed by proton beam writing. In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20, 2010, |
|---|
| 2010 | Fekete, Zoltán and Fürjes, Péter and Kárpáti, Tamás and Gál, Gabriella and Rajta, István: MEMS-compatible hard coating technique of moveable 3D silicon microstructures. In: MATERIALS SCIENCE FORUM, 659, 2010, 147-152 |
|---|
| 2009 | Rajta, István and Szilasi, Szabolcs Zoltán and Fürjes, Péter and Fekete, Zoltán and Dücső, Csaba: Si micro-turbine by proton beam writing and porous silicon micromachining. In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 267, 2009, 2292-2295 |
|---|
